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[1] (English) Woo Young Choi, Byung-Gook Park, and Jong Duk Lee, 

      Fundamentals of Silicon IC Processes (4th ed.), Munundang, 2011.

 

      (한글) 최우영, 박병국, 이종덕, 실리콘 집적회로 공정기술의 기초 (4), 문운당, 2011.

 
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